Products - Axcela System Configurations
The Axcela™ system can be configured with many combinations of pre-clean and PVD chambers, depending on wafer size, process and throughput requirements. A 200mm and a 300mm chambers are shown below.
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| A 200mm System Configuration | A 300mm System Configuration |
Many Chamber Configurations Available
| 1 ICP and 1 PVD | 1 ICP and 2 PVD | 1 ICP and 2 PVD - TSV |
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